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Nanofabrication is about creating structures with nanometer precision, whether thin films of nanometer thickness or lateral structures with nanodimensions. To create such nanostructures, we have three types of equipment at our...
To inspect structures with dimensions down to the nanometer scale, we use advanced types of optical microscopy.For example, (spinning disk) confocal microscopy is used to inspect the sample under study one point at a time and...
Photonic structures are designed to affect the motion of photons in a similar way as electronic materials (such as semiconductors) affect the motion of electrons. The periodicity that is key in these structures is mostly achieved...
Electron microscopes use electron beams to inspect tiny specimens in a similar way as light beams are used in optical microscopes. However, the use of electrons instead of photons (light) allows a much better resolution, down to...
Spin coating is a procedure to apply a uniform thin photoresist film to flat substrates. Also other materials can be applied, for instance quantum dots. The Delta 80 is equipped with the GYRSET® closed cover system....
The system employs a magnetron target assembly, argon discharge plasma, giving a fine-grain, cool sputtering of thin metal films....
Ion beam etching...
The Alpha-step is a mechanical, stylus-based step profiler that can measure step heights with sub-angstrom resolution....
Zeiss Axioskop2 mat optical microscope with epi illumination....
This SEM / FIB combines a scanning microscope (SEM) and focused ion beam (FIB) with gas chemistries....