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Infrastructure - "All"
OPAL/TSUANMI/MILLENNIA Laser system from Spectra Physcis
Raith e-Line lithography system Sem, fib, Ebid Laser
Suss MJB3 Mask aligner
Nanoscribe 3D laser lithography
Suss Delta 80 Spin coater
Magnetron sputter coater
Oxford Plasmalab 80+ Ion beam etching
Alpha-step surface profiler

