Dualbeam FIB / SEM

E 0.07

FEI Helios Nanolab 600

This SEM / FIB combines a scanning microscope (SEM) and focused ion beam (FIB) with gas chemistries.

SEM;  

           Schottky Field Emission Gun, SFEG

           Resolution 0.9nm at 15kV

           Accelerating voltage 350V – 30kV

           Maximum beam current 22nA

FIB;  

         Sidewinder ion column

          Ga liguid metal ion source, Ga LMIS

          Resolution 5nm at 30kV

          Accelarating voltage 0.5 – 30kV

           Beam current 1.5 pA – 20 nA

Gas chemistry EBID/IBID;

          Platinum metal deposition

          Gold deposition

          Insulator enhanced etch (XeF2)

          Insulator deposition II (TEOS)

Charge neutralizer

Fast beam blanker

Sample load lock

RF plasma cleaning system Evactron

Max. sample size 80mm diameter with full travel

http://en.wikipedia.org/wiki/Focused_ion_beam

http://www.fei.com/products/dualbeams/helios-nanolab.aspx

http://www.amsterdamnanocenter.nl/