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  • Delta 80
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Description

Suss Delta 80 Spin coater

Application

Appling a thin uniform photo resist layer on a substrate

References

\\cleanroomsrv\data\__documentation\spin coater Delta 80 (only from AMOLF accesible)

Location

E0.11

Specifications

Suss Delta 80 spin coater

Spin coating is a procedure to apply a uniform thin photo resist film to flat substrates

Spec’s;

Flat substrates up to 8” or fragments

Substrate thickness max 12 mm

Max. spin speed 3000 rpm

Storage of 20 recipes with up to 30 steps

Yields uniform, consistent coating thickness up to 20 micron

http://en.wikipedia.org/wiki/Spin_coating